EPION CORPORATION

Epion manufactures and supplies commercial gas cluster ion beam (GCIB) equipment for semiconductor and related manufacturing. Its products include nFusion Doping System, which offers ultra-shallow doping of atoms to high concentrations without channeling; and Ultra Trimmer Corrective Etch System that is used to trim surface layers to improve device performance or yields. It also markets GCIB systems to companies for the enhancement of critical surfaces in devices used for data storage, optics, and telecommunications in the United States and Japan. Epion Inc. was formerly known as Epion Corporation and changed its name to TEL Epion Inc. in January 2007. The company was founded in 1984 and is based in Billerica, Massachusetts.